利用吸收法测量薄膜厚度
论文编号:WLX025 字数:8750,页数:19摘 要 金属薄膜的物性及特性研究始终是关注的热点。对于金属薄膜而言，膜薄厚度是一个非常重要的特征尺寸，直接影响薄膜的使用特性，而几乎所有的薄膜特性又都与膜厚有关，尤其是厚度较小的薄膜，其特性还将出现明显的尺寸效应，所以膜厚的测量变得尤为重要。本文先介绍了有关薄膜背景和应用领域等方面。本论文最主要的是利用了光的吸收法来测量薄膜透射与膜厚的关系，从而来计算一些同材料的膜厚。具体地来说，对于不同厚度的薄膜，其对于光的吸收也会有一定的变化，也就是利用薄膜对光强的吸收特性。通过实验来得出光的透射率与薄膜厚度的关系，也就是光源通过薄膜所产生的衰减与薄膜厚度呈一定的关系，利用这种关系可以对薄膜厚度进行测量。关键词：吸收、膜厚、透射率、厚度测量Abstract The study of character of metal film is a hotspot all the time. For metal film the most important characteristic dimension is film thickness which directly affect the service performance of the film thickness, and almost all the service performance is relevant to its thickness, especially the film with thin thickness, its size effect will be apparent. Therefore, the measurement of film thickness become more important. At first, background and apply field of film are introduced. In order to measure the thickness, how to produce the film is significant. Different kinds of ways to produce film are introduced next. This article is mainly about the measurement of film thickness based on its absorption characteristic of light intensity. Actually, the relation between transimision and film thickness can be measured by experiments. Attenuation caused by the lamp-house passing through the film is relevant to its thickness, so film thickness will be measured according to this relation. Keywords: absorb、film thickness、transmissivity、thickness measurement 目录摘 要 iAbstract ii目录 iii第一章 绪论 11.1研究动机与目的 11.2 纳米金属膜的研究 11.3 内容概述 2第二章 测量薄膜厚度的方法 32.1 椭圆偏振法 32.2 微量天平法 32.3 石英晶体振荡法 32.4 电阻法 42.5 电容法 42.6 表面粗糙度仪法 42.7 其它测量薄膜的方法 5第三章 薄膜光学的基本理论 73.1 薄膜中的折射定律 73.2 均匀薄膜对光的反射及透射 73.2.1 反射 72.2.2 透射 8第四章 薄膜厚度测量 104.1 实验设计 104.2 实验数据 114.3 实验结果分析 12第五章 结论 14致谢 15参考文献 16
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